Porous Silicon Based Sensor for Organic Vapors
نویسندگان
چکیده
منابع مشابه
Gas sensitive porous silicon devices: responses to organic vapors
Geometrically scaled PS-based structures were fabricated in order to develop gas sensing devices by exploring porous silicon (PS) electrical characteristics. The electrical behavior of PS devices respond to polar organic vapors (as acetone and ethanol) reversibly in a reproducible way. Devices were fabricated with three different perimeters, maintaining a constant area (5.76 mm) and constant PS...
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ژورنال
عنوان ژورنال: Acta Physica Polonica A
سال: 2015
ISSN: 0587-4246,1898-794X
DOI: 10.12693/aphyspola.127.1400